At present, the multi-layer aluminum-nitrogen/aluminum solar selective absorption coating manufacturing technology is still commonly used in the production of vacuum collector tubes in my country. This technology was invented by Professor Yin Zhiqiang of Tsinghua University and his colleagues in 1984, and was declared a national patent in 1985... Keywords: solar energy, collector tube, coating.

　　At present, the multi-layer aluminum-nitrogen/aluminum solar selective absorption coating manufacturing technology is still commonly used in the production of vacuum collector tubes in my country. This technology was invented by Professor Yin Zhiqiang of Tsinghua University and his colleagues in 1984, applied for a national patent in 1985, and was approved in 1987 (Patent No.: ZL851001424).

　　The basic principle of this technology is to install a magnetron sputtering system with a single cylindrical aluminum target in the coating machine. The coating machine is loaded with dozens of glass tubes as inner tubes of the heat collecting tube at a time. Under the transmission of the planetary mechanism, the glass tubes revolve and rotate. A vertical cylindrical aluminum target is placed in the center, and the aluminum bottom layer is deposited by non-reactive sputtering in argon gas, and then nitrogen with a controlled flow rate is injected to prepare a multi-layer aluminum-nitrogen composite thin film material as the absorption layer.

　　This manufacturing technology, called gradient aluminum-nitrogen, aluminum solar selective absorption coating, has a solar absorption ratio of up to 0.93 and an emission ratio of about 0.05 (80°C). This is the first time in the world that only one metal material is used to prepare both the metal bottom layer and the selective absorption coating of composite thin film materials. Tsinghua Sunshine Company uses this technology to produce the Xile Brand Purple Gold series vacuum collector tubes. After testing by the National Light Industry Glass Product Quality Supervision and Inspection Center, its solar absorption ratio α=0.95 (AM1.5); hemispheric emission ratio εh=0 .050 (80℃±5℃).

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